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- Gina Milena Prieto-Novoa, Estrella Natali Borja-Goyeneche, Jhon Jairo Olaya-Florez, Effect of Ni content on the optical and electrical properties of ZrTiSiNiN thin films deposited by co-sputtering , Revista de la Academia Colombiana de Ciencias Exactas, Físicas y Naturales: Vol. 43 No. 168 (2019)
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Abstract
d Zr targets. The synthesis of the coatings was carried out by varying the discharge power in the Ti5 well as a variation in the deposit temperature at room temperature 130° and 260°C. The coatings were characterized by means of X-ray diffraction (XRD), evidencing the formation of the phase that belongs to the solid solution (Zr, Ti)N, scanning electron microscopy (SEM), UV-Vis spectroscopy and hardness and pin-on-disc tests. The thickness was measured through interferometry with values between 662 and 481nm for the deposited coatings. According to the failure mechanism in the scratch test, the best results were obtained with a power of 170W and 260°C with a cohesive failure Lc1 = 2.1N and an adhesive failure Lc2 = 4.7N.
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