How to Cite
Downloads
Métricas Alternativas
Dimensions
Abstract
Thin films of ZrTiSiNiN have been deposited onto a glass and silicon substrates by reactive magnetron co-sputtering of pure Ti5Si2, Zr alloy targets. In this investigation was located Ni pieces on Zr target in order to change the Ni amount in the films. The surface morphology and crystalline structure of the films were investigated by scanning electronic microscope (SEM), X-ray diffraction (XRD) and interferometry respectively. The electrical resistivity was measured by the four-point probe method and their optical properties were characterized by ultraviolet/visible (UV/Vis) spectroscopy. XRD results showed that nickel works as a grain refiner because the crystallite size is reduced from 27 nm to 15 nm when the Ni concentration increases from 0 to% to 6.8 to%. Both the electrical resistance and the optical “band gap” of the coatings increased with the decrease in crystallite size because of the increase in the density of grain boundaries and the quantum confinement effect.
References
Akbari, A., Riviere, J. P., Templier, C., & Le Bourhis, E. (2006). Structural and mechanical properties of IBAD deposited nanocomposite Ti-Ni-N coatings. Surface and Coatings Technology, 200 (22-23 SPEC. ISS.), 6298-6302. https://doi.org/10.1016/j.surfcoat.2005.11.046
Avinash, B. S., Chaturmukha, V. S., Jayanna, H. S., Naveen, C. S., Rajeeva, M. P., Harish, B. M., … Lamani, A. R. (2016). Effect of particle size on band gap and DC electrical conductivity of TiO2 nanomaterial (p. 20426). https://doi.org/10.1063/1.4946477
Belov, D. S., Blinkov, I. V., & Volkhonskii, A. O. (2014). The effect of Cu and Ni on the nanostructure and properties
of arc-PVD coatings based on titanium nitride. Surface and Coatings Technology. 260: 186-197. https://doi.org/10.1016/J.SURFCOAT.2014.09.069
Borja-Goyeneche, E. N., & Olaya-Florez, J. J. (2018). A microstructural and corrosion resistance study of (Zr, Si, Ti)N-Ni coatings produced through co-sputtering. DYNA. 85 (207): 192-197. https://doi.org 10.15446dyna.v85n207.73304
Chinsakolthanakorn, S., Buranawong, A., Witit-Anun, N., Chaiyakun, S., & Limsuwan, P. (2012). Characterization of nanostructured TiZrN thin films deposited by reactive DC magnetron co-sputtering. Procedia Engineering. 32:571-576. https://doi.org/10.1016/j.proeng.2012.01.1310
Crone, W. C. (2008). A Brief Introduction to MEMS and NEMS. In Springer-Verlag (Ed.), Handbook of Experimental Solid Mechanics. Retrieved from http://citeseerx.ist.psu.edu/viewdoc/download?doi=10.1.1.111.3275&rep=rep1& ype=pdf
Ebrahimi, F. (2012). Nanocomposites New Trends and Developments. https://doi.org/10.5772/3389
Jain, P., & Arun, P. (2013). Influence of grain size on the band-gap of annealed SnS thin films. Thin Solid Films. 548: 241-246. https://doi.org/10.1016/j.tsf.2013.09.089
Kaliaraj, G. S., Vishwakarma, V., Ramadoss, A., Ramachandran, D., & Rabel, A. M. (2015). Corrosion, haemocompatibility and bacterial adhesion behavior of TiZrN-coated 316L SS for bioimplants. Bulletin of Materials Science. 38(4): 951-955. https://doi.org/10.1007/s12034-015-0949-1
Kirik, G. V., Kozak, C., & Opielak, M. (2012). Protective coatings based on Zr-Ti-Si-N their physical and mechanical properties and phase composition. Przeglad Elektrotechniczny. 88 (10 A): 319-321. Retrieved from http://www.scopus.com/inward/record.url?eid=2-s2.0-84867220104&partnerID=tZOtx3y1
Lee, C. H., Guo, F. G., & Chu, C. C. (2012). The Thickness Dependent of Optical Properties, Resistance, Strain and Morphology of Mo Thin Films for The Back Contact of CIGS Solar Cells. Chinese Journal of Physics. 50 (2):311-321.
Lin, Y.-W., Huang, J.-H., & Yu, G.-P. (2010). Effect of nitrogen flow rate on properties of nanostructured TiZrN thin films produced by radio frequency magnetron sputtering. Thin Solid Films. 518 (FEBRUARY 2005): 7308-7311. https://doi.org/10.1016/j.tsf.2010.04.099
Lin, Y.-W., Lu, C.-W., Yu, G.-P., & Huang, J.-H. (2016). Structure and Properties of Nanocrystalline (TiZr) x N 1− x Thin Films Deposited by DC Unbalanced Magnetron Sputtering. Journal of Nanomaterials. 2016: 1-12. https://doi.org/10.1155/2016/2982184
Lind, H., Forsén, R., Alling, B., Ghafoor, N., Tasnádi, F., Johansson, M. P., … Odén, M. (2011). Improving thermal stability of hard coating films via a concept of multi-component alloying. Applied Physics Letters. 99 (9): 91903. https://doi.org/10.1063/1.3631672
Lindahl, E., Ottosson, M., & Carlsson, J. O. (2018). Doping of metastable Cu3N at different Ni concentrations: Growth, crystallographic sites and resistivity. Thin Solid Films. 647 (June 2017): 1-8. https://doi.org/10.1016j.tsf.2017.12.010
Marom, H., Ritterband, M., & Eizenberg, M. (2006). The contribution of grain boundary scattering versus surface scattering to the resistivity of thin polycrystalline films. Thin Solid Films. 510 (1-2): 62-67. https://doi.org/10.1016j.tsf.2005.12.155
Mathew, S., Menon, C. S., & Sudarsanakumar, C. (2008). Effect of thickness on the absorption spectra of GaPcCl, SnPcO and AlPcOH thin films. Optoelectronics and Advanced Materials, Rapid Communications. 2 (6): 349-352.
Mayrhofer, P. H., Mitterer, C., Hultman, L., & Clemens, H. (2006, November 1). Microstructural design of hard coatings. Progress in Materials Science. Pergamon. https://doi.org/10.1016/j.pmatsci.2006.02.002
Musil, J., Zeman, P., & Baroch, P. (2014). Hard Nanocomposite Coatings. Comprehensive Materials Processing (Vol. 4). Elsevier. https://doi.org/10.1016/B978-0-08-096532-1.00416-7
Panjan, P., Čekada, M., Panjan, M., Kek-Merl, D., Zupanič, F., Čurković, L., & Paskvale, S. (2012). Surface density of growth defects in different PVD hard coatings prepared by sputtering. Vacuum. 86 (6): 794-798. https://doi.org/10.1016/j.vacuum.2011.07.013
Pilloud, D., Dehlinger, A. S., Pierson, J. F., Roman, A., & Pichon, L. (2003). Reactively sputtered zirconium nitride coatings: structural, mechanical, optical and electrical characteristics. Surface and Coatings Technology. 174–175: 720-724. https://doi.org/10.1016/S0257-8972
Pilloud, D., Pierson, J. F., & Pichon, L. (2006). Influence of the silicon concentration on the optical and electrical properties of reactively sputtered Zr-Si-N nanocomposite coatings. Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 131 (1–3): 36-39. https://doi.org/10.1016/j.mseb.2006.03.017
Pogrebnjak, A. D., Shpak, A. P., Beresnev, V. M., Kolesnikov, D. A., Kunitskii, Y. A., Sobol, O. V., … Grudnitskii, V. V. (2012). Effect of Thermal Annealing in Vacuum and in Air on Nanograin Sizes in Hard and Superhard Coatings Zr–Ti–Si–N. Journal of Nanoscience and Nanotechnology. 12 (12): 9213-9219. https://doi.org/10.1166/jnn.2012.6777
Ramana, C. V., Smith, R. J., & Hussain, O. M. (2003). Grain size effects on the optical characteristics of pulsed-laser deposited vanadium oxide thin films. Physica Status Solidi (A) Applied Research. 199 (1): 5-7. https://doi.org/10.1002/pssa.200309009
Saladukhin, I. A., Abadias, G., Michel, A., Uglov, V. V., Zlotski, S. V., Dub, S. N., & Tolmachova, G. N. (2015). Structure and hardness of quaternary TiZrSiN thin films deposited by reactive magnetron co-sputtering. Thin Solid Films. 581:25-31. https://doi.org/10.1016/j.tsf.2014.11.020
Saladukhin, I. A., Abadias, G., Michel, A., Uglov, V. V., Zlotski, S. V., Dub, S. N., & Tolmachova, G. N. (2015). Structure and hardness of quaternary TiZrSiN thin films deposited by reactive magnetron co-sputtering. Thin Solid Films. 581:25-31. https://doi.org/10.1016/j.tsf.2014.11.020
Sandu, C. S., Medjani, F., & Sanjinés, R. (2007). OPTICAL AND ELECTRICAL PROPERTIES OF SPUTTERED Zr-Si-N THIN FILMS: FROM SOLID SOLUTION TO NANOCOMPOSITE. Rev.Adv.Mater.Sci (Vol. 15). Retrieved from http://phys.mech.nw.ru/e-journals/RAMS/no_31507/sandu.pdf
Sangiovanni, D. G. (2013). Transition Metal Nitrides Alloy Design and Surface Transport Properties using Ab--initio and Classical Computational Methods. Linköping University. Retrieved from https://liu.diva-portal.org/smash/get/diva2:617410/FULLTEXT01.pdf
Sherrer, P. (1918). Estimation of size and internal structural of colloidal particles by mean of Rontgen rays. Gottinger Nachrichten Math. Phys. 2: 98-100.
Singh, M., Goyal, M., & Devlal, K. (2018). Size and shape effects on the band gap of semiconductor compound nanomaterials. Journal of Taibah University for Science. 12(4): 470-475. https://doi.org/10.1080/16583655.2018.1473946
Smith, A. M., & Nie, S. (2010). Semiconductor nanocrystals: structure, properties, and band gap engineering. Accounts of Chemical Research. 43 (2): 190-200. https://doi.org/10.1021/ar9001069
Sudha, D., Dhanapandian, S., Manoharan, C., & Arunachalam, A. (2016). Structural, morphological and electrical properties of pulsed electrodeposited CdIn 2 Se 4 thin films.Results in Physics. 6: 599-605. https://doi.org/10.1016/j.rinp.2016.09.004
Tan, S., Zhang, X., Zhen, R., Tian, Z., & Wang, Z. (2015). Effect of Ni content on CrNiN coatings prepared by RF magnetron sputtering. 120: 54-59.
Tauc, J. (1974). Amorphous and Liquid Semiconductors. Springer US. Uglov, V. V., Abadias, G., Zlotski, S. V., Saladukhin, I. A., Skuratov, V. A., Leshkevich, S. S., & Petrovich, S. (2015). Thermal stability of nanostructured TiZrSiN thin films subjected to helium ion irradiation. Nuclear Instruments and Methods in Physics Research, Section B:Beam Interactions with Materials and Atoms. 354: 264-268. https://doi.org/10.1016/j.nimb.2014.12.043
Vemuri, R. S., Bharathi, K. K., Gullapalli, S. K., & Ramana, C. V. (2010). Effect of Structure and Size on the Electrical Properties of Nanocrystalline WO 3 Films. ACS Applied Materials & Interfaces. 2 (9): 2623-2628. https://doi.org/10.1021/am1004514
Wang, D.-Y., Chang, C.-L., Hsu, C.-H., & Lin, H.-N. (2000). Synthesis of (Ti, Zr)N hard coatings by unbalanced magnetron sputtering. Surface and Coatings Technology. 130 (1): 64-68. https://doi.org/10.1016S0257-8972(00)00675-7
Wang, Y. X., Zhang, S., Lee, J. W., Lew, W. S., & Li, B. (2013). Toughening effect of Ni on nc-CrAlN/a-SiNx hard nanocomposite. Applied Surface Science. 265: 418-423. https://doi.org/10.1016/j.apsusc.2012.11.022
Zhang, S., Sun, D., Fu, Y., Pei, Y. T., & De Hosson, J. T. M. (2005). Ni-toughened nc-TiN/a-SiNx nanocomposite thin films. Surface and Coatings Technology. 200 (5-6): 1530-1534. https://doi.org/10.1016/j.surfcoat.2005.08.080
Declaration of originality and transfer author's rights
The authors declare:
- The published data and reference materials have been duly identified with their respective credits and have been included in the bibliographic notes and citations that have been so identified and that should it be required, I have all releases and permissions from any copyrighted material.
- All material presented is free from any copyright and that I accept full legal responsibility for any legal claims relating to copyrighted intellectual property, fully exonerating from responsibility the Revista de la Academia Colombiana de Ciencias Exactas, Físicas y Naturales.
- This work is unpublished and will not be sent to any other journal while waiting for the editorial decision of this journal. I declare that there is no conflict of interest in this manuscript.
- In case of publication of this article, all author´s rights are transferred to the Revista de la Academia Colombiana de Ciencias Exactas, Físicas y Naturales, and so cannot be reproduced in any form without the express permission of it.
- By means of this document, if the article is accepted for publication by the Revista de la Academia Colombiana de Ciencias Exactas, Físicas y Naturales, the Revista assumes the right to edit and publish the articles in national and international indices or data bases for academic and scientific use in paper, electronic, CD-ROM, internet form either of the complete text or any other known form known or to be known and non-commercial, respecting the rights of the authors.
Transfer of author rights
In case the article is approved for publication, the main author in representation of himself and his co-authors or the main author and his co-authors must cede the author rights of the corresponding article to the Revista de la Academia Colombiana de Ciencias Exactas, Físicas y Naturales, except in the following cases:
The authors and co-authors will retain the right to revise, adapt, prepare derived works, oral presentations, and distribution to some colleagues of reprints of their own published work, if the corresponding credit is given to the Revista de la Academia Colombiana de Ciencias Exactas, Físicas y Naturales. It is also permissible to publish the title of the work, summary, tables, and figures of the work in the corresponding web sites of the authors or their employers, also giving credit to the Revista.
If the work has been realized under contract, the author’s employer has the right to revise, adapt, prepare derivative works, reproduce, or distribute in hard copy the published work, in a secure manner and for the exclusive use of his employees.
If the Revista de la Academia Colombiana de Ciencias Exactas, Físicas y Naturales were approached for permission by a third party for using, printing, or publishing specifically articles already published, the Revista must obtain the express permission of the author and co-authors of the work or of the employer except for use in classrooms, libraries, or reprinted in a collective work. The Revista de la Academia Colombiana de Ciencias Exactas, Físicas y Naturales reserves the possible use in its front cover of figures submitted with the manuscripts.
No other right, other than the author’s right, can be claimed by the Revista de la Academia Colombiana de Ciencias Exactas, Físicas y Naturales.