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Abstract
In order to characterize a device that modify their geometrical structure is desirable to dispose of a measurement technique reliable, precise and good-resolution that can be easily adapted to the experimental conditions. In this way, the Michelson interferometer is shown as a useful device to measure small deflections on a thermo-neumatically actuated silicon micromembrane. The interference rings obtained by the membrane surface modifications are counted to allow the estimation of the membrane dynamical behavior. The structure under test has an area of 4000 μm2, 14 μm thickness and 300 μm of cavity height.
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